Nagao Masanori | National Institute for Material Science, Tsukuba, Ibaraki 305-0047, Japan
スポンサーリンク
概要
- Nagao Masanoriの詳細を見る
- 同名の論文著者
- National Institute for Material Science, Tsukuba, Ibaraki 305-0047, Japanの論文著者
National Institute for Material Science, Tsukuba, Ibaraki 305-0047, Japan | 論文
- Isobutyl silane precursors for SiCH low-k cap layer beyond the 22nm node: analysis of film structure for compatibility of lower k-value and high barrier properties (Special issue: Advanced metallization for ULSI applications)
- Novel Precursor for Development of Si–C2H4–Si Networks in SiCH for Application as a Low-$k$ Cap Layer beyond 22 nm Nodes
- Proposal of New Precursors for Plasma-Enhanced Chemical Vapor Deposition of SiOCH Low-$k$ Films with Plasma Damage Resistance
- Novel Precursors for SiCH Low-$k$ Caps beyond the 22 nm Node: Reactions of Silacyclopentane Precursors in the Plasma-Enhanced Chemical Vapor Deposition Process and Structural Analyses of SiCH Films
- Preparation of oxide thin films with perovskite-related structure for future sensors