UEDA Takashi | Department of Applied Physics, Tokai University
スポンサーリンク
概要
Department of Applied Physics, Tokai University | 論文
- Ashing Properties in a Surface-Wave Mode Plasma with a Quartz Window
- Surface Wave Plasma Production Employing High Permittivity Material for Microwave Window : Nuclear Science, Plasmas, and Electric Discharges
- Ashing Properties in a Surface-Wave Mode Plasma with a High-Permittivity Alumina Window : Semiconductors
- Mode Transition Enhancement by Permittivity of Window Materials in Low Frequency Plasmas
- Enhancement of Negative-Ion-Assisted Silicon Oxidation by Radio-Frequency Bias