KODERA Masako | 論文著者

Advanced Discrete Development Center, Toshiba Electronic Devices & Storage Corporation, Nomi, Ishikawa 923-1293, Japan.

Advanced Technology Division, Precision Machinery Company, Ebara Corp.

Advanced Technology Division, Precision Machinery Company, Ebara Corp., 4-2-1 Honfujisawa, Fujisawa, Kanagawa 251-8502, Japan

Beol Process Development Deptartment 5 Process And Manufacturing Engineering Center Toshiba Semicond

BEOL Process Development Deptartment 5, Process and Manufacturing Engineering Center, Toshiba Semico

BEOL Process Development Deptartment 5, Process and Manufacturing Engineering Center, Toshiba Semiconductor Co.

BEOL Process Development Deptartment 5, Process and Manufacturing Engineering Center, Toshiba Semiconductor Co., 8 Shinsugita-cho, Yokohama 235-8522, Japan

Corporate Research and Development Center, Toshiba Corporation, Yokohama 235-8522, Japan

Department of Electrical and Electronic Engineering, Meiji University, Tama-ku, Kawasaki 214-8571, Japan

Device Process Development Center, Corporate Research & Development Center, Toshiba Corporation, 8 Shinsugita-cho, Isogo, Yokohama 235-8522, Japan

Process & Manufacturing Engineering Center Toshiba Corp.

Process & Manufacturing Engineering Center, Toshiba Corp.

Process And Manufacturing Engineering Center Toshiba Semiconductor Company

Process and Manufacturing Engineering Center, Toshiba Semiconductor Company

Process and Manufacturing Engineering Center, Toshiba Semiconductor Company, 8 Shinsugita-cho, Isogo-ku, Yokohama 235-8522, Japan