Effect of Substrate Temperature on Surface Properties of GeSbTe Film during Chemical Mechanical Polishing
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概要
- 論文の詳細を見る
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
著者
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Lim Dae-soon
Department Of Material Science And Engineering Korea University
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Lee Dong-hyun
Department Of Agricultural Biology And Research Center For New Biomaterials In Agriculture
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Shin Dong-Hee
Department of Nano-Semiconductor Engineering, Korea University, Seoul 136-713, Korea
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Hwang Eung-Rim
Research and Development Division, SK Hynix Semiconductor Inc., Icheon, Gyeonggi 467-701, Korea
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Hong Kwon
Research and Development Division, SK Hynix Semiconductor Inc., Icheon, Gyeonggi 467-701, Korea
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