Synthesis of Diamond-Like Carbon Films on Planar and Non-Planar Geometries by the Atmospheric Pressure Plasma Chemical Vapor Deposition Method (SELECTED TOPICS IN APPLIED PHYSICS : Diamond Semiconductors : from Materials to Devices)
スポンサーリンク
概要
著者
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Noborisaka Mayui
Center for Science of Environment, Resources and Energy, Graduate School of Science and Technology, Keio University, Yokohama 223-8522, Japan
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Hirako Tomoaki
Center for Science of Environment, Resources and Energy, Graduate School of Science and Technology, Keio University, Yokohama 223-8522, Japan
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Shirakura Akira
Center for Science of Environment, Resources and Energy, Graduate School of Science and Technology, Keio University, Yokohama 223-8522, Japan
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Watanabe Toshiyuki
Kanagawa Industrial Technology Center, Ebina, Kanagawa 243-0435, Japan
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Morikawa Masashi
Central Japan Railway Company, Nagoya 450-6101, Japan
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Seki Masaki
Central Japan Railway Company, Nagoya 450-6101, Japan
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Suzuki Tetsuya
Center for Science of Environment, Resources and Energy, Graduate School of Science and Technology, Keio University, Yokohama 223-8522, Japan
関連論文
- Synthesis of Diamond-Like Carbon Films on Planar and Non-Planar Geometries by the Atmospheric Pressure Plasma Chemical Vapor Deposition Method (SELECTED TOPICS IN APPLIED PHYSICS : Diamond Semiconductors : from Materials to Devices)
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