Comparison of process options for improving backend-of-line reliability in 28nm node technologies and beyond (Special issue: Advanced metallization for ULSI applications)
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概要
- 論文の詳細を見る
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
著者
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Aubel Oliver
Quality and Reliability Engineering, GLOBALFOUNDRIES Dresden Module One LLC & Co. KG, Wilschdorfer Landstrasse 101, 01109 Dresden, Germany
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Hennesthal Christian
Quality and Reliability Engineering, GLOBALFOUNDRIES Dresden Module One LLC & Co. KG, Wilschdorfer Landstrasse 101, 01109 Dresden, Germany
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Hauschildt Meike
Quality and Reliability Engineering, GLOBALFOUNDRIES Dresden Module One LLC & Co. KG, Wilschdorfer Landstrasse 101, 01109 Dresden, Germany
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Poppe Jens
Quality and Reliability Engineering, GLOBALFOUNDRIES Dresden Module One LLC & Co. KG, Wilschdorfer Landstrasse 101, 01109 Dresden, Germany
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Hahn Jens
Technology Integration, GLOBALFOUNDRIES Dresden Module One LLC & Co. KG, Wilschdorfer Landstrasse 101, 01109 Dresden, Germany
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Boemmels Juergen
Technology Integration, GLOBALFOUNDRIES Dresden Module One LLC & Co. KG, Wilschdorfer Landstrasse 101, 01109 Dresden, Germany
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Nopper Markus
Unit Processing, GLOBALFOUNDRIES Dresden Module One LLC & Co. KG, Wilschdorfer Landstrasse 101, 01109 Dresden, Germany
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Seidel Robert
Technology Integration, GLOBALFOUNDRIES Dresden Module One LLC & Co. KG, Wilschdorfer Landstrasse 101, 01109 Dresden, Germany