Optimum frequency for inductively coupled plasma generation with a single-loop antenna

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概要

• 論文の詳細を見る
• Japan Society of Applied Physicsの論文

著者

• Kusaba Kouta

  Department Of Information Telecommunication And Electronics Tokai University

• Shindo Haruo

  Department Of Information Telecommunication And Electronics Tokai University

関連論文

• Mode Transition Enhancement by Permittivity of Window Materials in Low Frequency Plasmas
• Optimum frequency for inductively coupled plasma generation with a single-loop antenna

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