High Performance PI/PTFE Layered Films Fabricated by EB Irradiation

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概要

• 論文の詳細を見る

著者

• Oshima Akihiro

  Osaka Univ. Osaka Jpn

• Nagai Hiroyuki

  Waseda Univ. Tokyo Jpn

関連論文

• High Performance PI/PTFE Layered Films Fabricated by EB Irradiation
• Electron Beam Lithography Using Highly Sensitive Negative Type of Plant-Based Resist Material Derived from Biomass on Hardmask Layer

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