Performance Characterization of Thin AIN Films deposited on Mo Electrode for Thin-Film Bulk Acoustic-Wave Resonators
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概要
- 論文の詳細を見る
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2004-08-15
著者
-
Tay Kok-wan
Department Of Electrical Engineering National Cheng Kung University
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HUANG Cheng-Liang
Department of Electrical Engineering, National Cheng Kung University
-
WU Long
f-Tech Corporation
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LIN Meng-Shan
Department of Electrical Engineering, National Cheng Kung University
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- Performance Characterization of Thin AIN Films deposited on Mo Electrode for Thin-Film Bulk Acoustic-Wave Resonators
- Influence of Piezoelectric Film and Electrode Materials on Film Bulk Acoustic-Wave Resonator Characteristics
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- Performance Characterization of Thin AlN Films deposited on Mo Electrode for Thin-Film Bulk Acoustic-Wave Resonators
- Effect of AlN Film Thickness and Top Electrode Materials on Characteristics of Thin-Film Bulk Acoustic-Wave Resonator Devices
- Influence of Piezoelectric Film and Electrode Materials on Film Bulk Acoustic-Wave Resonator Characteristics