Synthesis of a Novel Polymer with Acid Amplifier Unit in the Side Chain and Application for Photoresist Materials

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概要

• 論文の詳細を見る
• Technical Association of Photopolymers, Japanの論文

著者

• LEE Sungeun

  Chemical Resources Laboratory, Tokyo Institute of Technology

• Park Sang-wook

  The Dept.of Electrical And Electronic Eng.yonsei Univ.

• Lee S

  Chemical Resources Laboratory Tokyo Institute Of Technology

• Arimitsu K

  Tokyo Univ. Sci. Chiba Jpn

関連論文

• Polymers with Acid-amplifying Side Chains as Positive-type Photoresists
• A Novel Photoresist Based on Polymeric Acid Amplifiers
• Synthesis of a Novel Polymer with Acid Amplifier Unit in the Side Chain and Application for Photoresist Materials
• Synthesis and Characteristics of a Novel Acid Amplifier with a Low Absorbance at l93 nm
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• Chemical Modification of SWCNT and VGCF by Radical Addition Reaction
• Preparation of YBCO and BSCCO Superconducting Thin Films by a New Chemical Precursor Method
• Syntheses and Structural Analyses of 1, 3-Diphenyldisiloxanes as a Building Block of Silsesquioxanes
• Trioxane Derivative as an Acid Amplifier Exhibiting a Non-linear Organic Reaction

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