Submicron scale image observation with a grazing incidence reflection-type single-shot soft X-ray microscope

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概要

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• A grazing incidence reflection-type soft X-ray microscope, using a Fresnel zone plate and a soft X-ray laser with wavelength 13.9 nm and pulse width 7 ps, was developed. Submicron size groove structures made on a Pt film were clearly captured at a single shot exposure, with spatial resolution of about 360 nm. A wide field view of 100 µm square was secured under the Kohler illumination. This microscope also had a large depth of focus of more than 100 µm and was proven to have a sufficient performance for observing surface morphological changes.

• Institute of Physicsの論文
• 2014-07-03

著者

• BABA Motoyoshi

  Institute for Solid State Physics, The University of Tokyo

• Baba Motoyoshi

  Institute for Solid State Physics, The University of Tokyo, Kashiwa, Chiba 277-8581, Japan.Department of Ophthalmology and Advanced Laser Medical Center, Faculty of Medicine, Saitama Medical University, Moroyama, Saitama 350-0495, Japan.

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• Submicron scale image observation with a grazing incidence reflection-type single-shot soft X-ray microscope

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