Optoelectronic Properties of Indium--Tin Oxide Films Deposited on Flexible and Transparent Poly(dimethylsiloxane) Substrate

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In this article, we report the thin-film deposition of indium--tin oxide (ITO) as a transparent conductive oxide (TCO) on a flexible and transparent poly(dimethylsiloxane) (PDMS) substrate by RF sputtering. PDMS, an elastomeric polymer, is highly transparent and can withstand much higher temperatures ({\sim}200 °C) than other commercially used polymers in electronics. In this study, we discussed the Hall electrical measurements and optical transmittance data for ITO thin films on a PDMS substrate. We demonstrated that the transparent PDMS polymer is a new flexible TCO material, with suitable electrical and optical properties for use in electronic devices. An ITO thin film with an electrical resistivity of 3.8 \times 10^{-5} \Omega cm, a carrier concentration of 5.9\times 10^{21} cm3, a mobility of 3 cm2V-1s-1, and an average transmittance of 83% was achieved on the PDMS polymeric substrate.
2013-11-25