Spalling of a Thin Si Layer by Electrodeposit-Assisted Stripping
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概要
- 論文の詳細を見る
A major goal in solar cell research is to reduce the cost of the final module. Reducing the thickness of the crystalline silicon substrate to several tens of micrometers can reduce material costs. In this work, we describe the electrodeposition of a Ni--P alloy, which induces high stress in the silicon substrate at room temperature. The induced stress enables lift-off of the thin-film silicon substrate. After lift-off of the thin Si film, the mother substrate can be reused, reducing material costs. Moreover, the low-temperature process expected to be improved Si substrate quality.
- 2013-11-25
著者
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Lee Jung-ho
Department Of Civil Engineering Kangwon National University
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Yoo Bongyoung
Department Of Bio Nano Technology Hanyang University
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Um Han-Don
Department of Bionanotechnology, Hanyang University, Ansan, Gyeonggi 426-791, Republic of Korea
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Yoo Bongyoung
Department of Nano and Solar Energy Engineering, Hanyang University, Ansan, Gyeonggi 426-791, Republic of Korea
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Kwon Youngim
Department of Nano and Solar Energy Engineering, Hanyang University, Ansan, Gyeonggi 426-791, Republic of Korea
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Yang Changyol
Department of Nano and Solar Energy Engineering, Hanyang University, Ansan, Gyeonggi 426-791, Republic of Korea
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Yoon Sang-Hwa
Department of Material Engineering, Hanyang University, Ansan, Gyeonggi 426-791, Republic of Korea
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Lee Jung-Ho
Department of Chemical Engineering, Hanyang University, Ansan, Gyeonggi 426-791, Republic of Korea
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