Fabrication of Silicon Microchannel for Transport of Bacterial Cells by Ar/F

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概要

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• We fabricated a Si based microchannel without cover plates by an Ar/F<inf>2</inf>vapor etching process. In the Ar/F<inf>2</inf>vapor etching process, the Si substrate was etched in proportion to the etching time with good controllability. We succeeded in the transport of Escherichia coli cells in the microchannel. In addition, we fabricated a Si-based two-step microchannel without cover plates by Ar/F<inf>2</inf>vapor etching and Cl<inf>2</inf>-based inductively coupled plasma (ICP) etching processes. The proposed microchannel would be useful for the separation of bacterial cells according to size.

• 2013-04-25

著者

• Matsutani Akihiro

  Semiconductor and MEMS Processing Center, Technical Department, Tokyo Institute of Technology, Yokohama 226-8503, Japan

• Takada Ayako

  Biomaterial Analysis Center, Technical Department, Tokyo Institute of Technology, Yokohama 226-8501, Japan

関連論文

• Fabrication of Silicon Microchannel for Transport of Bacterial Cells by Ar/F
• Compact Slow-Light Electro-Absorption Modulator Laterally Integrated with 980 nm Vertical-Cavity Surface-Emitting Laser

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