In-Plane Oblique Pulsed-Laser Deposition and Its Application to the Fabrication of Metal Oxide Nanoconstrictions

概要

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We propose a novel approach to fabricate metal oxide nanostructures with locally modified thicknesses. Utilizing a nanoscale shadowing effect induced by a three-dimensional nanotemplate patterned on a substrate, we demonstrate that pulsed-laser deposition in an in-plane oblique configuration enables us to locally grow an oxide. The analysis on the growth position reveals that it can be precisely defined by adjusting only a few geometrical parameters. A ferromagnetic oxide Fe<inf>2.5</inf>Zn<inf>0.5</inf>O<inf>4</inf>nanoconstriction with a bottleneck width of 65 nm and a length of 53 nm is fabricated by controlling the incident azimuthal angle and growth duration in sequential deposition processes.
2013-03-25