Transmission Electron Microscopy Analysis of a Threading Dislocation with c+a Burgers Vector in 4H-SiC
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概要
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A threading dislocation (TD) in 4H-SiC, which was interpreted as a right-handed threading screw dislocation (TSD) by synchrotron monochromatic-beam X-ray topography (SMBXT) and molten KOH etching with Na2O2 additive (KN etching), was characterized by large-angle convergent-beam electron diffraction (LACBED) and weak-beam dark-field methods. It was found that this TD was a so-called c+a dislocation with Burgers vector of \mbi{b}=[000\bar{1}]+(1/3)[\bar{2}110], which is often misinterpreted as TSD (c-dislocation) by SMBXT and KN etching. The rotation direction of the screw component within the c+a TD determined by LACBED agreed with the SMBXT observation.
- 2012-08-25
著者
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IKUHARA Yuichi
Nanostructures Research Laboratory, Japan Fine Ceramics Center
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YAMAGUCHI Satoshi
Toyota Technological Institute
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ISHIKAWA Yukari
Materials Research and Development Laboratory, Japan Fine Ceramics Center
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Ishikawa Yukari
Materials Research and Development Laboratory, Japan Fine Ceramics Center, Nagoya 456-8587, Japan
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Sugawara Yoshihiro
Nanostructures Research Laboratory, Japan Fine Ceramics Center, Nagoya 456-8587, Japan
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Nakamori Michio
Nanostructures Research Laboratory, Japan Fine Ceramics Center, Nagoya 456-8587, Japan
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Yao Yong-Zhao
Materials Research and Development Laboratory, Japan Fine Ceramics Center, Nagoya 456-8587, Japan
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Danno Katsunori
Vehicle Engineering Group, Toyota Motor Corporation, Susono, Shizuoka 410-1193, Japan
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Suzuki Hiroshi
Vehicle Engineering Group, Toyota Motor Corporation, Susono, Shizuoka 410-1193, Japan
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Bessho Takeshi
Vehicle Engineering Group, Toyota Motor Corporation, Susono, Shizuoka 410-1193, Japan
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Nishikawa Koichi
Toyota Central Research and Development Laboratories Inc., Nagakute, Aichi 480-1192, Japan
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YAO Yong-Zhao
Materials Research and Development Laboratory, Japan Fine Ceramics Center
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NISHIKAWA Koichi
Toyota Central Research and Development Laboratories Inc.
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BESSHO Takeshi
Vehicle Engineering Group, Toyota Motor Corporation
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Yamaguchi Satoshi
Toyota Central Research and Development Laboratories Inc., Nagakute, Aichi 480-1192, Japan
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SUGAWARA Yoshihiro
Nanostructures Research Laboratory, Japan Fine Ceramics Center
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DANNO Katsunori
Vehicle Engineering Group, Toyota Motor Corporation
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YAMAGUCHI Satoshi
Toyota Central Research and Development Laboratories Inc.
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NAKAMORI Michio
Nanostructures Research Laboratory, Japan Fine Ceramics Center
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Ikuhara Yuichi
Nanostructure Research Laboratory, Japan Fine Ceramics Center, Nagoya 456-8587, Japan
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Ikuhara Yuichi
Nanostructures Research Laboratory, Japan Fine Ceramics Center, Nagoya 456-8587, Japan
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Nishikawa Koichi
Toyota Central R&D Laboratories Inc., Nagakute, Aichi 480-1192, Japan
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