Vibration Analysis and Transmission Characteristics of Piezoelectric Micromachined Ultrasonic Transducers Using Epitaxial Pb(Zr,Ti)O3 Thin Films on \gamma-Al2O3/Si Substrate
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概要
- 論文の詳細を見る
Low-voltage ({<}12 V)-operation piezoelectric micromachined ultrasonic transducers (pMUTs) are hoped to be integrated with Si-LSI. Realizing this requires not only improving the piezoelectric properties, but also clarifying the vibration modes of transducers. In this study, we experimentally investigated the vibration mode and transmission ultrasonic waves by pMUTs using epitaxial Pb(Zr,Ti)O3 thin films on the epitaxial \gamma-Al2O3/Si substrates to radiate ultrasonic waves effectively. Five resonance vibration modes appeared in 100-μm-diameter circular pMUTs at frequencies in the range from 1 to 10 MHz in air. The frequency of mode (0,1) was 2.2 MHz, and this mode radiates ultrasonic waves very effectively. Ultrasonic transmission was also achieved in water using the above vibration mode, applying voltage of less than 10 Vp--p. These results show the potential for high-frequency pMUT integration with Si devices.
- 2012-11-25
著者
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Okada Nagaya
Honda Electronics Co. Ltd.
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Suzuki Keisuke
Department Of Chemistry Keio University
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Ishida Makoto
Electronics-Inspired Interdisciplinary Research Institute (EIIRIS), Toyohashi University of Technology, Toyohashi, Aichi 441-8580, Japan
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Akai Daisuke
Electronics-Inspired Interdisciplinary Research Institute (EIIRIS), Toyohashi University of Technology, Toyohashi, Aichi 441-8580, Japan
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Ozaki Katsuya
Department of Electrical and Electronic Information Engineering, Toyohashi University of Technology, Toyohashi, Aichi 441-8580, Japan
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Numata Yasuyuki
Department of Electrical and Electronic Information Engineering, Toyohashi University of Technology, Toyohashi, Aichi 441-8580, Japan
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Suzuki Keisuke
Department of Applied Chemistry and Biotechnology, Faculty of Engineering, Yamanashi University
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