Computational Fluid Dynamics Modeling of Mono-Silane Siemens Reactor

概要

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The computational fluid dynamics-based FLUENT program was employed to model the heat transfer and chemical reaction in a mono-silane Siemens reactor. The kinetic parameters for the 1-step overall reaction \text{SiH_{4}}\rightarrow \text{Si}+ \text{2H_{2}}, such as the pre-exponential factor, temperature coefficient, and activation energy, were carefully optimized to satisfy experimental data obtained from the 4-rod Siemens pilot reactor. Established models were successfully used to evaluate the effects of rod diameter, reaction temperature, and reactant gas flow rate on the deposition rate of silicon.
2012-10-25