Fabrication and Characteristics of Nanoscale Stacked-Tunneling-Junctions on Graphite Flake Using Focused Ion Beam
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概要
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We report the successful fabrication and characteristics of a nanoscale stack of tunneling junctions formed along the c-axis of thin graphite flakes. The stack was made by a three-dimensional focused-ion-beam etching method. First, a submicron bridge was patterned in a required junction width by normal-direction etching. By tilting the sample stage to 90°, two grooves on the bridge were etched from the lateral direction in order to create the required stack size. The stacked junctions showed a perfect c-axis transport behavior and nonlinear current--voltage (I--V) characteristics at all studied temperatures. We discussed the nonlinear I--V characteristics in detail using the Schottky barrier model and Fowler--Nordheim (FN) tunneling theory. The stack transport characteristics showed good agreement with FN tunneling behavior.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2011-06-25
著者
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Venugopal Gunasekaran
Nano Materials and System Laboratory, Department of Mechanical System Engineering, Graduate School of Engineering, Jeju National University, Jeju 690-756, Republic of Korea
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Kim Sang-Jae
Faculty of Mechatronics Engineering and Research Institute of Advanced Technology, Jeju National University, Jeju 690-756, Republic of Korea
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Kim Gui
Faculty of Mechanical System Engineering, Jeju National University, Jeju 690-756, Republic of Korea