Deflections of Magnetic Actuator under Different Directions of External Magnetic Field

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概要

• 論文の詳細を見る

• A magnetic actuator consisting of a $70\times 0.525\times 1$ μm3 silicon oxide microcantilever and a $70\times 5\times 1$ μm3 silicon oxide plate deposited on a $50\times 1\times 0.09$ μm3 ferromagnetic thin film is successfully fabricated using electron beam lithography and electron beam evaporation, and placed in various magnetic fields to observe its flexure. The magnetic actuator is bent using a magnetic torque produced by a ferromagnetic thin film under an external magnetic field owing to the fabrication of a highly sensitive microcantilever and the design of a high magnetic shape anisotropy. In this study, the magnetic actuator is placed in three magnetic field directions to investigate its diversity of deflections; the angles between the easy axis of the ferromagnetic thin film and the direction of the external magnetic field are 90, 80, and 45°.

• 2011-05-25

著者

• Wei Zung-hang

  Department Of Physics National Taiwan University

• Chang Jung-Shao

  Department of Power Mechanical Engineering, National Tsing Hua University, Hsinchu 300, Taiwan

• Lai Mei-Feng

  Department of Power Mechanical Engineering, National Tsing Hua University, Hsinchu 300, Taiwan

• Hsieh Yi-Ping

  Department of Power Mechanical Engineering, National Tsing Hua University, Hsinchu 300, Taiwan

• Chen Wei-Yuan

  Department of Power Mechanical Engineering, National Tsing Hua University, Hsinchu 300, Taiwan

• Hung Hui-Chun

  Department of Power Mechanical Engineering, National Tsing Hua University, Hsinchu 300, Taiwan

• Li Yun-Jui

  Department of Power Mechanical Engineering, National Tsing Hua University, Hsinchu 300, Taiwan

• Shiao Hong-Ren

  Department of Power Mechanical Engineering, National Tsing Hua University, Hsinchu 300, Taiwan

• Huang Chen-Chi

  Department of Power Mechanical Engineering, National Tsing Hua University, Hsinchu 300, Taiwan

• Wei Zung-Hang

  Department of Power Mechanical Engineering, National Tsing Hua University, Hsinchu 300, Taiwan

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