Palladium--Hydrogen Complex in Silicon Observed by Electron Spin Resonance Measurement
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概要
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We have investigated a palladium--hydrogen complex in silicon by electron spin resonance (ESR) measurement. A new ESR spectrum was detected in a sample diffused with palladium and hydrogen. The hyperfine structure of hydrogen atoms in the ESR spectrum shows that the spectrum originates from a palladium--hydrogen complex containing three hydrogen atoms (Pd--H<sub>3</sub>). The anisotropic $g$-value of Pd--H<sub>3</sub> shows that the Pd--H<sub>3</sub> complex has an anisotropic character of orthorhombic ($C_{2v}$) symmetry. The calculated $g$-values of the Pd--H<sub>3</sub> complex are $g_{1} = 2.12$, $g_{2} = 2.10$, and $g_{3} = 2.03$, and the $g_{2}$ axis is along the $\langle 100 \rangle$ direction. The anisotropic character of orthorhombic ($C_{2v}$) symmetry results from a configuration consisting of one Pd atom at a substitutional site, two equivalent hydrogen atoms at interstitial sites along the $\langle 111 \rangle$ direction, and one hydrogen atom at the next-nearest-neighbor interstitial site along the $\langle 100 \rangle$-twofold symmetry axis. We have also studied the dissociation of a platinum--hydrogen complex by thermal treatment. The activation energy for the dissociation of the Pd--H<sub>3</sub> complex is estimated to be about 1.6 eV.
- 2011-09-25
著者
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Yamashita Yoshifumi
The Graduate School of Natural Science and Technology, Okayama University, Okayama 700-8530, Japan
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Yamashita Yoshifumi
The Graduate School of Natural Science and Technology, Okayama University, 3-1-1 Tsushima-naka, Okayama 700-8530, Japan
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Kamiura Yoichi
The Graduate School of Natural Science and Technology, Okayama University, 3-1-1 Tsushima-naka, Okayama 700-8530, Japan
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Ishiyama Takeshi
The Graduate School of Natural Science and Technology, Okayama University, 3-1-1 Tsushima-naka, Okayama 700-8530, Japan
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Kamiura Yoichi
The Graduate School of Natural Science and Technology, Okayama University, Okayama 700-8530, Japan
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Mori Yuya
The Graduate School of Natural Science and Technology, Okayama University, Okayama 700-8530, Japan
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Ishiyama Takeshi
The Graduate School of Natural Science and Technology, Okayama University, Okayama 700-8530, Japan
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Kimura Shutaro
The Graduate School of Natural Science and Technology, Okayama University, Okayama 700-8530, Japan
関連論文
- Palladium--Hydrogen Complex in Silicon Observed by Electron Spin Resonance Measurement
- Effects of Hydrogen on Depth Profile of Resistivity of SiGe on Si Substrate