Electrical Property and Long-Term Stability of Transparent Capacitors Using Multi-Layer Transparent Conducting Oxide Electrodes

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概要

• 論文の詳細を見る

• Transparent capacitors of Al0.016In0.003Zn0.981O (AIZO)/Ag/AIZO/Bi2Mg2/3Nb4/3O7 (BMN)/AIZO/glass were prepared using BMN films with various thicknesses grown on AIZO/glass (Corning 1737) substrates by pulsed laser deposition. The BMN films deposited at 150 °C on the AIZO electrode exhibited a dielectric constant of 49--55, a dielectric loss of 3--7% at the frequency of 100 kHz and the leakage current densities of ${\sim}10^{-8}$ A/cm2 at 200 kV/cm, in the range of the thickness from 50 to 200 nm. After damp heat treatment for 300 h under the condition of 85% relative humidity at 85 °C, the electrical properties in the BMN capacitors were slightly degraded. The AIZO/Ag/AIZO/BMN/AIZO capacitors maintained the optical transmittance of approximately 77% at a wavelength of 500 nm after damp heat treatment.

• 2011-03-25

著者

• Xian Cheng-Ji

  Mechanical Design, Manufacturing and Automation, Yanbian University of Science and Technology, Chaoyang Street, Yanji, Jilin 3458, China

• Yoon Soon-Gil

  School of Nano Science and Technology, Chungnam National University, Daeduk Science Town, Daejeon 305-764, Korea

• Park Jong-Man

  School of Nano Science and Technology, Chungnam National University, Daeduk Science Town, Daejeon 305-764, Korea

• Jung Hyun-June

  School of Nano Science and Technology, Chungnam National University, Daeduk Science Town, Daejeon 305-764, Korea

関連論文

• Electrical Property and Long-Term Stability of Transparent Capacitors Using Multi-Layer Transparent Conducting Oxide Electrodes
• Enhancement of Temperature Sensitivity for Metal--Insulator--Semiconductor Temperature Sensors by Using Bi2Mg2/3Nb4/3O7 Film

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