Preparation of Scandia-Stabilized Zirconia Electrolyte Thin Films for Intermediate Temperature-Solid Oxide Fuel Cells by Electron Beam Vapor Deposition

概要

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Thin films of scandia-stabilized zirconia (ScSZ) for a solid oxide fuel cell (SOFC) electrolyte were prepared using electron beam vapor deposition. The effects of annealing temperature, substrate temperature, and e-beam gun power on the structure and surface morphology of the thin films were examined. It was found that the ScSZ thin film samples annealed at approximately 1000 °C consisted of a single cubic phase. The crystal orientation of the ScSZ films increased with substrate temperature and with e-beam gun power. A good adhesion to the substrate and a columnar structure were observed from the fractured cross-sectional view of the ScSZ films on a NiO-YSZ anode substrate. The ionic conductivity of the ScSZ film with 2.5 μm thickness was observed to be $9.46\times 10^{-3}$ S cm-1 at 700 °C with the conduction activation energy of 0.82 eV. The results in this study showed that the crystallite size of the ScSZ thin films and thus the electrochemical properties can be improved by optimizing e-beam deposition conditions and annealing temperature.
2011-01-25