Super Smooth Modification of Al2O3 Ceramic Substrate by High Temperature Glaze of CaO--Al2O3--SiO2 System
スポンサーリンク
概要
- 論文の詳細を見る
The rough surface of ceramic substrate is an obstacle for the scale down of line-width for thin film passive integrated devices (PID). In this paper, a modification method for Al2O3 ceramic substrate with super smooth in surface was proposed. Coating a layer of CaO--Al2O3--SiO2 (CAS) glass was performed to flat the rough surface of alumina substrate by sol--gel method. It was found that addition of 0.06% V2O5 can inhibit the recrystallization of the glaze. The root-mean-square (RMS) roughness of the glazed substrates reached a surprising flatness as small as 0.5 nm, and its melting temperature is higher than 1300 °C. This substrate with super flatness and high temperature endurance may be promising for high performance thin film devices.
- 2011-01-25
著者
-
Zhang Jihua
State Key Laboratory Of Electronic Thin Films And Integrated Devices University Of Electronic Scienc
-
Chen Hongwei
State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 610054, China
-
Zhen Shanxue
State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 610054, China
-
Yang Lijun
State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 610054, China
-
Lou Feizhi
State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 610054, China
-
Yang Chuanren
State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 610054, China
関連論文
- Super Smooth Modification of Al2O3 Ceramic Substrate by High Temperature Glaze of CaO--Al2O3--SiO2 System
- Optimized Process of Mn-Doped Ba0.5Sr0.5TiO Thin Films on Platinum Coated Sapphire Substrates
- Nonlinear Optical Properties of the Lanthanum-Modified Lead Zirconate Titanate Ferroelectric Thin Films Using $Z$-Scan Technique