Development of Surface Acoustic Wave-Based Microgyroscope Utilizing Progressive Wave

概要

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An 80 MHz surface acoustic wave (SAW)-based gyroscope utilizing a progressive wave was developed on a 128° YX LiNbO3 piezoelectric substrate. The sensor developed consists of two SAW oscillators in which one is used as the sensing element and has metallic dots in the cavity between input and output interdigital transducers (IDTs). The other is used as the reference element. Coupling of modes (COM) modeling was conducted to determine the optimal device parameters prior to fabrication. On the basis of the simulation results, the device was fabricated and then measured on a rate table. When the device was subjected to an angular rotation, oscillation frequency differences between the two oscillators were observed because of the Coriolis force acting on the metallic dots. Depending on the angular velocity, the difference in oscillation frequency was modulated. The obtained sensitivity was approximately 52.35 Hz deg-1 s-1 at an angular rate range of 0–1000 deg/s. Device performances at different mass weights, mass positions, and temperatures were characterized. Good thermal stability was also observed during the evaluation process.
2010-06-25