Lead Zirconate Titanate Acoustic Energy Harvester Proposed for Microelectromechanical System/IC Integrated Systems
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概要
- 論文の詳細を見る
In this paper, we report on microelectromechanical system (MEMS) energy harvesters with a diaphragm consisting of a 1-μm-thick lead zirconate titanate (PZT) film formed by the sol–gel method. Electrical power can be generated using the piezoelectric effects of the PZT diaphragm that vibrates in acoustic fields. Harvesters with different diaphragm diameters of 1.5 and 2.0 mm were fabricated. The top electrode covered the entire PZT diaphragm. The measured first resonance frequencies of those diaphragms were 6.02 and 5.72 kHz, and the third resonance frequencies were 24.02 and 18.02 kHz, respectively. The measured frequency spectrum indicated that the induced voltages are larger and more widely distributed for the third resonance than for the first resonance. Those devices generated power of $1.1 \times 10^{-11}$ and $5.1 \times 10^{-12}$ W under the irradiation of 100 dB sound pressure at their third resonance frequencies.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2010-04-25
著者
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Itoh Hisanori
Department Of Earth And Planetary Sciences Kyushu University
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Yasushiro Nishioka
Department of Precision Machinery, College of Science and Technology, Nihon University, 7-24-1 Narashinodai, Funabashi, Chiba 274-8501, Japan
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Shinoda Shigeki
Department of Precision Machinery, College of Science and Technology, Nihon University, 7-24-1 Narashinodai, Funabashi, Chiba 274-8501, Japan
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Tai Takahiro
Department of Precision Machinery, College of Science and Technology, Nihon University, 7-24-1 Narashinodai, Funabashi, Chiba 274-8501, Japan
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Tomohisa Sugou
Department of Precision Machinery, College of Science and Technology, Nihon University, 7-24-1 Narashinodai, Funabashi, Chiba 274-8501, Japan
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Hirohide Ichioka
Department of Precision Machinery, College of Science and Technology, Nihon University, 7-24-1 Narashinodai, Funabashi, Chiba 274-8501, Japan
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Shu Kimura
Department of Precision Machinery, College of Science and Technology, Nihon University, 7-24-1 Narashinodai, Funabashi, Chiba 274-8501, Japan
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Takahiro Tai
Department of Precision Machinery, College of Science and Technology, Nihon University, 7-24-1 Narashinodai, Funabashi, Chiba 274-8501, Japan
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Shigeki Shinoda
Department of Precision Machinery, College of Science and Technology, Nihon University, 7-24-1 Narashinodai, Funabashi, Chiba 274-8501, Japan
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Hisanori Itoh
Department of Precision Machinery, College of Science and Technology, Nihon University, 7-24-1 Narashinodai, Funabashi, Chiba 274-8501, Japan
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- Lead Zirconate Titanate Acoustic Energy Harvester Proposed for Microelectromechanical System/IC Integrated Systems