Simple Model to Inclusively Understand a Radiated Wave Field in Slot-Excited Microwave Plasmas

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概要

• 論文の詳細を見る

• A simple model to inclusively understand radiated wave fields in slot-excited microwave plasmas has been developed. It is shown that the result of the simple model has a good agreement with that of a full wave model from the viewpoint of the mode spectra. The calculation cost of the simple model is considerably lower than that of a commonly used full wave model. In addition, it is also shown that the mode spectra exist in the broad region in the case of a few slots and in the narrow region in the case of many slots. The comparison with the experimental results supports that the physical phenomena such as mode jumps and hysteresis behavior observed in experiments are understood in terms of the mode spectra. Therefore, the simple model is useful to inclusively understand the antenna system and to design an antenna system with the complex slot geometry.

• 2010-12-25

著者

• Yasaka Yasuyoshi

  Electrical and Electronic Engineering, Graduate School of Engineering, Kobe University, 1-1 Rokkodai, Nada, Kobe 657-8501, Japan

• Tsuji Akihiro

  Electrical and Electronic Engineering, Graduate School of Engineering, Kobe University, 1-1 Rokkodai, Nada, Kobe 657-8501, Japan

関連論文

• New Simulation Approach to Controlling Plasma Uniformities
• Simple Model to Inclusively Understand a Radiated Wave Field in Slot-Excited Microwave Plasmas
• Studies on Density Dependence of Charge Separation in a Direct Energy Converter Using Slanted Cusp Magnetic Field

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