Fabricating Nanostructures by Atomic Force Microscopy
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概要
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In this study, we used a conductive Atomic Force Microscopy (AFM) probe to fabricate nanostructures and nanopatterns on a silicon chip using nano-oxidation technology. The height of grown oxidized nanodots tends to increase as the piezoelectric loading in nano-oxidation increases, while the number of oxidized nanodots affects the height of oxidation. In terms of patterning, the height and width of nanodots tend to decrease as the probe scanning speed increases. Moreover, in this study, we used nano-oxidation to perform complex nanopatterning, and found that complex and well-defined nanopatterns could be fabricated on a scale of $1000 \times 1000$ nm2. The technology proposed in this study can directly define nanostructures without limitations of the wavelength of the light source and light diffraction. The technology has the advantages of low cost and great potential for development.
- 2009-09-25
著者
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Yang Sen-Yeu
Department of Mechanical Engineering, National Taiwan University, Taipei 106, Taiwan
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Wang Jui-Yang
Department of Mechanical Engineering, Tungnan University, Taipei 222, Taiwan
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Huang Jen-Ching
Department of Mechanical Engineering, Tungnan University, Taipei 222, Taiwan
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Weng Yung-Jin
Center for General Education, Kainan University, Taoyuan 338, Taiwan
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Weng Yung-Chun
Department of Mechanical Engineering, National Taiwan University, Taipei 106, Taiwan
関連論文
- Fabricating Nanostructures by Atomic Force Microscopy
- A Novel Method for Fabrication of Plastic Microlens Array with Aperture Stops for Projection Photolithography