A Novel Method for Fabrication of Plastic Microlens Array with Aperture Stops for Projection Photolithography
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概要
- 論文の詳細を見る
Microlens projection lithography is a new lithography method that uses a microlens array with aperture stops to image a single pattern on a mask onto a resist layer, forming an array of the miniaturized pattern. However, the fabrication of a microlens array with aperture stops is complicated, time-consuming and requires expensive facilities. In this paper, we report a single-step fabrication method of plastic microlens arrays with aperture stops. By using gas pressure to hot press a stainless-steel shadow mask with a microhole array onto a thermoplastic film, the softened polymer material is partially filled into the holes of the shadow mask, and forms a convex surface due to surface tension. After cooling, while keeping the microlens array and shadow mask attached, a plastic microlens array with aperture stops is obtained. To verify its capacity, a microlens projection lithography facility has been designed, constructed, and tested. Arrays of μm-sized patterns have been successfully fabricated using transparency masks of a mm-sized pattern.
- 2007-05-15
著者
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Chang Chih-yuan
Department Of Automation Engineering Kao Yuan Institute Of Technology
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Wu Meng-Sheng
Department of Mechanical Engineering, National Taiwan University, Taipei 106, Taiwan
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Chang Chih-Yuan
Department of Mechanical Engineering, National Taiwan University, Taipei 106, Taiwan
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Yang Sen-Yeu
Department of Mechanical Engineering, National Taiwan University, Taipei 106, Taiwan
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Jiang Liang-Ting
Department of Mechanical Engineering, National Taiwan University, Taipei 106, Taiwan
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Wang Lon
Department of Electrical Engineering and Institute of Electro-Optical Engineering, National Taiwan University, Taipei 106, Taiwan
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- A Novel Method for Fabrication of Plastic Microlens Array with Aperture Stops for Projection Photolithography
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