Improvement in Electrical Properties of Laser Ablated Barium Strontium Titanate Thin Films by Controlled Oxygen Atmosphere
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概要
- 論文の詳細を見る
Thin films of Ba0.6Sr0.4Ti0.99Fe0.01O3 (BST) were deposited on Pt/Si substrates at two different substrate temperatures (650 and 700 °C) by pulsed laser deposition. The perovskite structure of the films was confirmed by X-ray diffraction (XRD) analysis and atomic force microscopy (AFM) was carried out to observe the surface morphology. The detailed electrical properties such as dielectric constant, loss tangent, tunability and leakage current of the films were investigated in order to determine their suitability for application in microwave tunable devices.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2009-06-25
著者
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Prakash Chandra
Defence Research and Development Organization, Head Quarters, New Delhi 110016, India
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Thakur Om
Solid State Physics Laboratory, Timarpur, Delhi 110054, India
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Laishram Radhapiyari
Solid State Physics Laboratory, Timarpur, Delhi 110054, India
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Bhattacharya Dilip
Solid State Physics Laboratory, Timarpur, Delhi 110054, India