Transition Mechanism of WOx Available for Optical Disc by Laser Irradiation
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概要
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WOx thin films are one of the candidates for the recording layer of write-once optical discs and the inorganic photoresist material used in heat-mode mastering. We have investigated the transformation mechanism of WOx during laser irradiation. As a result, we observed changes in the volume and crystallinity of WOx film. We conclude from various analyses that the solubility of WOx film in alkali solution may sensitively depend on the atomic ordering determined by deposition conditions or laser exposure conditions.
- 2009-03-25
著者
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Yusu Keiichiro
Corporate Research And Development Center Toshiba Corporation
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Matsumaru Masaaki
New DVD Division, Toshiba Corp., 8 Shinsugita-cho, Isogo-ku, Yokohama 235-8522, Japan
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Katsuda Shinichi
New DVD Division, Toshiba Corp., 8 Shinsugita-cho, Isogo-ku, Yokohama 235-8522, Japan
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Yamamoto Ryosuke
Corporate Research & Development Center, Toshiba Corp., 1 Komukai-Toshiba-cho, Saiwai-ku, Kawasaki 212-8582, Japan
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Nakamura Naomasa
New DVD Division, Toshiba Corp., 8 Shinsugita-cho, Isogo-ku, Yokohama 235-8522, Japan
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Yusu Keiichiro
Corporate Research & Development Center, Toshiba Corp., 1 Komukai-Toshiba-cho, Saiwai-ku, Kawasaki 212-8582, Japan
関連論文
- Transition Mechanism of WOx Available for Optical Disc by Laser Irradiation
- High-Resolution Examination of Recording Marks in Phase-Change Media Using a Scanning Near-Field Optical Microscope
- Observation of Amorphous Recording Marks Using Reflection-Mode Near-Field Scanning Optical Microscope Supported by Optical Interference Method