Inorganic Reflective Achromatic Quarter-Waveplate for Optical Pick-up Applications

概要

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This paper discusses the design, fabrication and application of a quarter-waveplate (QWP) element to address reliability, retardance achromaticity, small wavefront distortion and low-cost aspects of polarization controlling components in high definition, three-channel optical-pickup systems. The retarder is an all-inorganic reflective QWP that provides achromatic 90° retardance for the three laser wavelength bands. These 200-mm wafer scale fabrication parts show a retardance uniformity of about 3%. The surface distortion of these thin-film coated components has been measured to be less than 0.01 waves RMS over 4.5 mm square aperture at 633 nm wavelength. These all-inorganic reflective QWPs developed by JDSU are flexible in design, durable and highly reliable under high light flux exposure and adverse environmental conditions. Several prototype parts have been tested for damp-heat, thermal cycling, low and high temperature storage and the measured 0.5% retardance variations after 2300 h is comparable to the errors of retardance metrology.
Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
2009-03-25