Fabrication and Analysis of GaAs Triangular Two-Dimensional Photonic Crystals on Silicon Wafers
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概要
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We have experimentally demonstrated the fabrication of GaAs triangular two-dimensional photonic crystals (2D PCs) on a silicon wafer by divinylsiloxane–bis(benzocyclobutene) (DVS–BCB) wafer bonding. Various types of 2D PCs, including cavities and waveguides, have been successfully fabricated. A 2D PC array with a total of ${\sim}900$ array elements has been well formed in a $0.9\times 0.7$ mm2 region. In addition, we have theoretically analyzed the photonic band structures of GaAs triangular 2D PCs covered with DVS–BCB cladding. Although the cladding is not air, a large photonic band gap for transverse-electric modes can be obtained. We also investigated various properties of DVS–BCB-clad 2D PC cavities, including modal symmetry, resonant frequency, $Q$ factor, and modal volume.
- 2008-09-25
著者
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Komori Kazuhiro
Photonics Research Institute Aist
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YAMAMOTO Noritsugu
Photonics Research Institute, National Institute of Advanced Industrial Science and Technology (AIST
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Okano Makoto
Photonics Research Institute, National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba Central 2, 1-1-1 Umezono, Tsukuba, Ibaraki 305-8568, Japan
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Yamamoto Noritsugu
Photonics Research Institute, National Institute of Advanced Industrial Science and Technology, Tsukuba, Ibaraki 305-8568, Japan
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Komori Kazuhiro
Photonics Research Institute, National Institute of Advanced Industrial Science and Technology, Tsukuba, Ibaraki 305-8568, Japan
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