Electron Trap Level of Cu-Doped ZnO
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概要
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The electron trap level of Cu-doped ZnO has been investigated. Films with Cu contents from 0.01 to 1 at. % were deposited by RF magnetron sputtering onto (0001)-oriented sapphire substrates at 300 °C, and annealed at 900 °C. The resistivity of these films was high and increased with increasing Cu content. Hall measurements carried out at high temperatures of approximately 400 °C showed exponential temperature dependence. The results were analyzed assuming that donors and electron traps coexist. The electron trap energy level was determined to be in the 0.30–0.35 eV range below the conduction band edge.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2008-12-25
著者
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Furukawa Akio
Department of Electrical Engineering, Tokyo University of Science, Noda, Chiba 278-8510, Japan
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Furukawa Akio
Department of Biological Sciences, Faculty of Science, Nara Women's University
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Tokunaga Takahiro
Department of Electrical Engineering, Tokyo University of Science, Noda, Chiba 278-8510, Japan
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Ogasawara Naoto
Department of Electrical Engineering, Tokyo University of Science, Noda, Chiba 278-8510, Japan
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Yokozawa Ryoji
Department of Electrical Engineering, Tokyo University of Science, Noda, Chiba 278-8510, Japan
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