Delta-Shaped Piezoelectric Ultrasonic Motor for Two-Dimensional Positioning
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概要
- 論文の詳細を見る
By fabricating on from lambda-shaped motors, bimorph delta-shaped motors have been developed and tested. A delta motor consists of two piezoelectric layers (bimorph structure) with four input electrodes and one common ground electrode — separated by an inactive bar that aids dimensional control in the sintering process. Two driving sources with a 90° phase difference were used for the $x$-, $z$-, and diagonal-axis direction driving. The design of the motor was modified and optimized by changing the relative dimensions and angle of the motor with the aid of ATILA finite element method (FEM) software. The optimum design with a small bandwidth between resonance modes, which provides the largest elliptical displacement, was fabricated using thick films. The fabricated motor size was below 10 mm2 with several hundreds of nano meter motion at the tip. The speed of revolution, torque and efficiency in the two-dimensional space were measured.
- 2008-01-25
著者
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Randall Clive
Center For Dielectric Studies Materials Research Institute The Pennsylvania State University
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Eitel Richard
Center For Dielectric Studies Materials Research Institute The Pennsylvania State University
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Park Seung-ho
International Center For Actuators And Transducers Materials Research Institute Pennsylvania State U
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Tuncdemir Safakcan
International Center For Actuators And Transducers Materials Research Institute The Pennsylvania Sta
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Uchino Kenji
International Center For Actuators And Transducers (icat) Intercollege Materials Research Laboratory
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Agraz Jose
International Center for Actuators and Transducers, Materials Research Institute, The Pennsylvania State University, University Park, PA 16802, U.S.A.
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Kim Young-Deog
Sensor and Instrumentation Research Team, Research Institute of Industrial Science and Technology, Pohang 790-600, Republic of Korea
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Baker Amanda
Center for Dielectric Studies, Materials Research Institute, The Pennsylvania State University, University Park, PA 16802, U.S.A.
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