Inkjet Printing of Nickel Nanosized Particles for Metal-Induced Crystallization of Amorphous Silicon

概要

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We demonstrated for the first time single-crystal grain growth in the solid-phase crystallization of amorphous silicon ($a$-Si) film induced by inkjet-printed colloidal solution containing Ni nanosized particles. The electrostatic inkjet nozzle with a needle can print dots of Ni colloidal solution, whose size ranges from submicron order to a few ten micrometers, on the $a$-Si film surface by controlling the needle apex radius and the number of applied voltage pulses. The dependence of the crystallization behavior of $a$-Si on dot size is investigated by electron backscattering pattern (EBSP) analysis. Crystallization behavior is categorized into three modes: single-crystal growth, polycrystal growth, and lateral-crystal growth. Statistical analysis suggests that, when the dot size is 0.86 μm in diameter, a single-crystal grain is grown at the inkjet-printed sites with a probability of 0.62.
Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
2007-09-30