Development of Step-and-Scan-Type $XY$-Stage System for Electron Beam Systems

概要

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The trend towards minimization in ultralarge-scale integration (ULSI) fabrication requires an increasingly precise motion accuracy for an $XY$-stage in a high-vacuum environment of electron beam (e-beam) systems. Aerostatic bearings allow for an extremely smooth motion, because the slider of the $XY$-stage is supported by an air film under a noncontact condition. However, such an $XY$-stage in aerostatic bearings is not easily introduced into the e-beam systems because of the markedly high amount of exhaust gas leaking into a vacuum chamber. In this paper, we describe a newly developed hybrid $XY$-stage guided by aerostatic bearings equipped with a noncontact seal mechanism for scanning motion and by mechanical rolling guides for stepping motion.
Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
2007-09-30