Micro-Optical Fiber Coupler on Silicon Bench Based on Microelectromechanical Systems Technology

概要

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A microelectromechanical systems (MEMS)-based, micro-optical fiber coupler to obtain a high power laser diode beam is integrated with a fiber rod lens and an array of SU-8 lenses, through each of which the laser beams emitted from the laser diodes are collimated vertically and horizontally, respectively, thus increasing the coupling efficiency. The fibers bundle and the laser diodes are assembled in one package on a silicon optical bench. The optical properties of the SU-8 lenses are suitable for high power laser diode application. The collimation of the beams passing the rod lens and the SU-8 lenses was confirmed. According to the simulation and experimental results, the coupling efficiency of the fiber coupler was increased by the insertion of the SU-8 lenses when the emitter width of the laser diode was wide.
2007-08-30