Absolute Measurement of Surface Vibrational Distribution in Piezoelectric Devices Using Burst-Wave Driving

概要

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A non mechanical scanning method is developed for mapping absolute vibrational patterns of piezoelectric devices based on a burst-wave resonator drive and the laser speckle method. By taking into account the statistical treatment for the distributions of the speckle intensity, absolute vibrational shapes can be visualized. This method is based on a simple relationship of coherent light interference on device surfaces and the linear relationship of piezoelectricity. To derive the interference factor $\gamma$, which is mandatory for determining absolute displacement, a polynomial approximation is applied to an expression of the difference in the brightness caused by the interference condition between the resonator-resting and resonator-driving states. This is because $\gamma$ cannot be directly obtained from the interference equations when the device being tested is excited by the burst signal. Although the sensitivity of this method is less than that of the synchronized laser speckle method, its simple measurement system and wide frequency range more than offset this disadvantage. An experimental result for a 23 MHz AT-cut quartz resonator is also presented.
Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
2007-07-30