Investigation of Micro Solid Immersion Lens Mounting Systems
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概要
- 論文の詳細を見る
Concept, design and analysis of several solid immersion lens (SIL) mounting systems utilizing high-index refractive micro SILs are described. This paper proposes several designs for wafer-scale SIL assemblies capable of a numerical aperture of 2.2.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2007-06-30
著者
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Lang Matthew
University of Arizona College of Optical Sciences, 1630 E University Blvd., Tucson, AZ 85721, U.S.A.
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Milster Tom
University of Arizona Optical Sciences Center, 1630 E University Blvd., Tucson, AZ 85721 USA
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Minamitani Takahisa
MEMS Optical Inc., 205 Import Circle, Huntsville, AL 35806 USA
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Borek Gregg
MEMS Optical Inc., 205 Import Circle, Huntsville, AL 35806 USA
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Minamitani Takahisa
MEMS Optical Inc., 205 Import Circle, Huntsville, AL 35806, U.S.A.
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Borek Gregg
MEMS Optical Inc., 205 Import Circle, Huntsville, AL 35806, U.S.A.
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Milster Tom
University of Arizona College of Optical Sciences, 1630 E University Blvd., Tucson, AZ 85721, U.S.A.
関連論文
- Fabrication and Characterization of Sub-100 μm Diameter Gallium Phosphide Solid Immersion Lens Arrays
- Investigation of Micro Solid Immersion Lens Mounting Systems