Fabrication of Thermally Durable Sub-wavelength Periodic Structures upon Inorganic–Organic Hybrid Materials by Nano-imprinting

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概要

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• We fabricated sub-wavelength periodic structures by thermal nano-imprinting using our original functionally modified inorganic–organic hybrid materials. The fabricated structures exhibited excellent uniformity and surface smoothness over a large imprinted area. In addition, optical transmittance is more than 90% within visible wavelength regions after heat treatment for 2 h at 300 °C. These nano-imprinted periodic structures showed high thermal durability without any structural changes after heating for 2 h at 200 °C, which is superior to commercially available organic imprinting materials. These nano-imprinted sub-wavelength periodic structures using our original inorganic–organic hybrid materials offer great potential for several applications in microphotonic and nanophotonic devices.

• Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
• 2007-06-15

著者

• Nishii Junji

  Nano-structured Photonic Device Group, Photonic Research Institute, National Institute of Advanced Industrial Science and Technology, 1-8-31 Midorigaoka, Ikeda, Osaka 563-8577, Japan

• Kang Dong

  Nano-structured Photonic Device Group, Photonic Research Institute, National Institute of Advanced Industrial Science and Technology, 1-8-31 Midorigaoka, Ikeda, Osaka 563-8577, Japan

• Bae Byeong-Soo

  Laboratory of Optical Materials and Coating, Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology, 373-1 Guseong-dong, Yuseong-gu, Daejeon 305-701, Republic of Korea

関連論文

• Fabrication of Thermally Durable Sub-wavelength Periodic Structures upon Inorganic–Organic Hybrid Materials by Nano-imprinting

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