High-Performance Film Bulk Acoustic Wave Pressure and Temperature Sensors

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概要

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• A film bulk acoustic wave resonator (FBAR)-based sensor for the simultaneous measurement of temperature and pressure with high sensitivity is fabricated and characterized. Temperature or pressure sensing is determined by the change in the series resonant frequency of the FBAR device when exposed to a measurement environment. For temperature sensing, measurement results show a sensitivity of 25.02 ppm/°C, a nonlinearity less than $\pm 0.005$% over the measurement range of 10 to 80 °C, and a hysteresis within $\pm 0.005$% in one temperature cycle. In pressure sensing, measured results show a sensitivity of 336.2 ppm/bar, a nonlinearity less than $\pm 0.004$% over the measurement pressure range of 0 to 2.07 bar, and a hysteresis within $\pm 0.007$% in one pressure cycle.

• Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
• 2007-04-15

著者

• Huang Star

  Institute Of Electronics Engineering National Tsing Hua University

• Chen Hong-ren

  Asia Pacific Microsystems Inc.

• Chiu Kuan-hsun

  Institute Of Electronics Engineering National Tsing Hua University

• Chen Hong-Ren

  Asia Pacific Microsystems Inc., No.2 R&D Rd. VI, Science-based Industrial Park, Hsinchu, Taiwan 300, R.O.C

• Huang Star

  Institute of Electronics Engineering, National Tsing Hua University, 101, Section 2, Kuang Fu Road, Hsinchu, Taiwan 300, R.O.C

関連論文

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• Fabrication and Characterization of a Three-Dimensional Flexible Thermopile
• High-Performance Film Bulk Acoustic Wave Pressure and Temperature Sensors

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