Rotating Symmetrical Piezoelectric Microactuators for Magnetic Head Drives
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概要
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A unique piezoelectric microactuator for the head-slider drive dual-stage actuator systems in magnetic disk drives has been developed. This microactuator is based on a rotating symmetrical structure and a symmetrical operation. The piezoelectric actuator elements used in the system have a simple rectangular multilayered structure. A prototype model with pico slider and head suspension has been tested to demonstrate 0.86 μm displacement at a dc applied voltage of 30 V and observed main resonant frequency of over 20 kHz. No fluctuation in flying height was observed.
- 2006-09-30
著者
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Kurihara Kazuaki
Devices and Materials Research Laboratories, Fujitsu Laboratories Ltd., 10-1 Morinosato Wakamiya, Atsugi, Kanagawa 243-0197, Japan
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Kondo Masao
Devices and Materials Research Laboratories, Fujitsu Laboratories Ltd., 10-1 Morinosato Wakamiya, Atsugi, Kanagawa 243-0197, Japan
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Hida Masaharu
Devices and Materials Research Laboratories, Fujitsu Laboratories Ltd., 10-1 Morinosato Wakamiya, Atsugi, Kanagawa 243-0197, Japan
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Umemiya Shigeyoshi
Devices and Materials Research Laboratories, Fujitsu Laboratories Ltd., 10-1 Morinosato Wakamiya, Atsugi, Kanagawa 243-0197, Japan
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Koganezawa Shinji
HDD Development Department, Fujitsu Ltd., 4-1-1 Kamikodanaka, Nakahara, Kawasaki 211-8588, Japan
関連論文
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