Physical Analysis of Connected Clean Units in Clean-Unit System Platform
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概要
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The time dependence of airborne particle count in connected clean units with a feedback loop in a clean-unit system platform (CUSP) is studied. We have estimated the mutual conductance of air flow in connected CUSP units, and the conductance is confirmed to be irrespective of the sizes of airborne particles. The connected CUSP units can maintain a cleanliness as good as ISO class 1–2 even when they are set in a typical office room. The emission rate of physically adsorbed particles from the inner walls of our CUSP unit is found to be 0.012 m-2 s-1 for particles with diameters of 0.3 μm. The airborne particle count in a deactivated CUSP unit, under the condition that the neighboring CUSP unit is activated, remains only ${\sim}5$ times larger than that in the activated CUSP units even for particles with diameters of 0.1 μm. The CUSP can serve as a platform for cross-disciplinary fields such as nanostructure physics as well as nanobiotechnologies.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2006-08-15
著者
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Rahaman Md.
Laboratory of Quantum Electronics, Research Institute for Electronic Science, Hokkaido University, Sapporo 060-0812, Japan
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Kawaguchi Nobuyoshi
Laboratory of Quantum Electronics, Research Institute for Electronic Science, Hokkaido University, Sapporo 060-0812, Japan
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Kaiju Hideo
Laboratory of Quantum Electronics, Research Institute for Electronic Science, Hokkaido University, Sapporo 060-0812, Japan
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Ishibashi Akira
Laboratory of Quantum Electronics, Research Institute for Electronic Science, Hokkaido University, Sapporo 060-0812, Japan
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Kaiju Hideo
Laboratory of Quantum Electronics, Research Institute for Electronic Science, Hokkaido University, Sapporo 001-0020, Japan
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Kawaguchi Nobuyoshi
Laboratory of Quantum Electronics, Research Institute for Electronic Science, Hokkaido University, Sapporo 001-0020, Japan
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Ishibashi Akira
Laboratory of Quantum Electronics, Research Institute for Electronic Science, Hokkaido University, Sapporo 001-0020, Japan
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Kaiju Hideo
Laboratory of Nanostructure Physics, Research Institute for Electronic Science, Hokkaido University, Sapporo 001-0020, Japan
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