Development of an Angle Calibration System with a Combined Silicon Polygon and Angle Interferometer

概要

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We developed a new angle calibration system combining a pure silicon crystal in a natural state and an angle interferometer with a wide span of rotation. The uncertainty in the angle of the six-faced silicon polygon is approximately $10^{-8}$ rad (0.004$''$), and the angle resolution of the angle interferometer is 0.005$''$. We evaluated the performance of the angle calibration system and summarized its budget of uncertainty. The uncertainty of the system was estimated to be $ \pm 0.07''$ ($k=2$). To demonstrate the new calibration system, we used it to measure the angle error of an index table, and we compared the results with existing calibration methods.
Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
2006-06-15