Miniaturized Angular Rate Sensor with Laminated Quartz Tuning Fork

概要

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We have developed a miniaturized angular rate sensor ($5.0\times 3.2\times 1.3$ mm3) with a laminated quartz tuning fork ($3.7\times 0.97\times 0.24$ mm3). An advanced reliable assembly process technology was applied to the packaging of LSI and the sensor element of the small thin sensor. Therefore, the sensor had high quality and superior mass productivity. The characteristics of the angular rate sensor were evaluated and results sufficiently met the target of development for consumer angular rate sensor. We concluded that the sensor can be used for consumer products, such as digital still cameras and digital video cameras.
Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
2006-05-30