Atomic Force Microscopy in Dynamic Mode with Displacement Current Detection in Double Cantilever Devices

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概要

• 論文の詳細を見る

• A cantilever array for dynamic mode atomic force microscopy (AFM) is presented, the vertical displacement of which is analyzed by the detection of displacement currents in the electrodes. Each cantilever in the array consists of an actuation part that allows an independent vertical movement, and a sensor part. The lateral distance between the tips of the different cantilevers is fixed to 10 μm. When operated as an actuator, a voltage is applied between the silicon membrane and the underlaying electrode. Due to the resulting coulomb forces, the vertical position of the tip is controllable. The reaction time in this mode is shorter than the response time of a piezostack. The sensor part, on the other hand, allows the device to work in dynamic mode without a laser deflection system. The vertical resolution achieved is below 1 nm. The dependence of force distance curves on the excitation amplitude is shown.

• Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
• 2006-03-30

著者

• Gessner Thomas

  Center of Microtechnology, Chemnitz University of Technology, 09107 Chemnitz, Germany

• Muller Falk

  Department of Physics, Chemnitz University of Technology, 09107 Chemnitz, Germany

• Muller Anne-Dorothea

  Anfatec Instruments AG, Melanchthonstr. 28, 08606 Oelsnitz, Germany

• Hietschold Michael

  Department of Physics, Chemnitz University of Technology, 09107 Chemnitz, Germany

• Müller Falk

  Department of Physics, Chemnitz University of Technology, 09107 Chemnitz, Germany

関連論文

• Atomic Force Microscopy in Dynamic Mode with Displacement Current Detection in Double Cantilever Devices

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