Evaluations of Electron Density and Temperature in Atmospheric-Pressure Radio-Frequency Helium Plasma Jet
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概要
- 論文の詳細を見る
In this study, the electrical discharge characteristics of an atmospheric-pressure helium plasma jet using radio-frequency power supply are investigated by measuring the electrical parameters (voltage, current, power, and phase angle). The plasma parameters (electron temperature and electron density) are estimated on the basis of the electrical experiment data using the equivalent circuit model and the power balance equation. By varying input power, a "phase saturation" region is identified. The optimized flow rate ratio between oxygen and helium is found to be 0.1/40 slpm in the experiment.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2006-12-15
著者
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Pu Yi-Kang
Department of Engineering Physics, Tsinghua University, Beijing 100084, China
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Li Shou-Zhe
State Key Laboratory of Materials Modification by Laser, Ion and Electron Beam and Department of Physics, Dalian University of Technology, Dalian 116024, China
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Wang De-Zhen
State Key Laboratory of Materials Modification by Laser, Ion and Electron Beam and Department of Physics, Dalian University of Technology, Dalian 116024, China
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Zhu Wen-Chao
Department of Engineering Physics, Tsinghua University, Beijing 100084, China