Numerical Calculation of Implanted Nitrogen Diffusion in SUS304 during Plasma-Based Ion Implantation
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概要
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Two-dimensional temperature rising in an austenitic stainless steel SUS304 trench object with plasma-based ion implantation (PBII) was numerically simulated, where the thermal input on the surface of the trench structure was derived from the calculation of plasma sheath evolution. The difference in temperature distribution was a few Kelvin although the convex corner of the trench had a larger thermal flux than the concave corner. Using the calculated temporal evolution of object temperature, we numerically studied the diffusion of implanted nitrogen ions in the SUS304 trench surface heated by PBII. In addition, the formation of the expanded austenitic phase $\gamma'_{\text{N}}$-Fe, which can enhance the hardness of the material, is discussed on the basis of the calculated depth profile of the implanted nitrogen.
- 2006-10-30
著者
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Akamatsu Hiroshi
Department Of Electric Engineering Himeji Institute Of Technology
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Hattori Hiroyuki
Department Of Applied Physics Faculty Of Engineering Nagoya University
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Akamatsu Hiroshi
Department of Electrical Engineering, Kobe City College of Technology, 8-3 Gakuenhigashi-machi, Nishi-ku, Kobe 651-2194, Japan
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