Characterization of Thick Amorphous Carbon Films Formed by Pulse Bias Filtered Cathodic Vacuum Arc

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概要

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• To form several-micrometer-thick diamond-like carbon (DLC) films, pulse bias filtered cathodic vacuum arc deposition was performed. In this study, nonhydrogenated DLC films were evaluated using visible and ultraviolet Raman spectroscopy, an electron energy loss spectroscopy (EELS) and a nano indenter. All observations indicated that the sp3 ratio of the DLC films decreases with increasing applied pulse bias. However, a moderately high sp3 ratio of 42.3% was obtained for 500-nm-thick DLC films with a compressive stress of 3.5 GPa formed at a pulse bias of 500 V, a pulse width of 25 μs, and a frequency of 1500 Hz.

• Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
• 2006-10-15

著者

• Lau Shu

  School Of Electrical & Electric Engineering Nanyang Technological University

• Lau Shu

  School of Electrical and Electronic Engineering, Nanyang Technological University, Blok S1, Nanyang Avenue, 639798, Singapore

• Yasui Nobuto

  Central Research Laboratory, Hitachi Ltd., 292, Yoshida-cho, Totsuka-ku, Yokohama 244-0817, Japan

• Inaba Hiroshi

  Central Research Laboratory, Hitachi Ltd., 292, Yoshida-cho, Totsuka-ku, Yokohama 244-0817, Japan

• Chiba Hiromu

  Central Research Laboratory, Hitachi Ltd., 292, Yoshida-cho, Totsuka-ku, Yokohama 244-0817, Japan

• Yang Xudong

  Central Research Laboratory, Hitachi Ltd., 292, Yoshida-cho, Totsuka-ku, Yokohama 244-0817, Japan

関連論文

• Characterization of Thick Amorphous Carbon Films Formed by Pulse Bias Filtered Cathodic Vacuum Arc
• Ultraviolet Lasing Phenomenon of Zinc Oxide Hexagonal Microtubes

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